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0020-34696 Slit Valve Liner
0020-34696 SLIT VALVE LINER . 2nd Source New. AMAT OXIDE ETCH 5000.
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0040-02544 Upper Body, Dps Metal
0040-02544 Upper Body, DPS Metal. 2nd Source New. Centura 5200 DPS.
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0040-35057 REV.C WELDMENT,SLIT VALVE INSERT,PROCESS CHAMBER
0040-35057 REV. C Weldment Slit Valve Insert Process Chamber 2nd Source New. 2nd Source New.
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0021-02983 TXZ Inner Shield
0021-02983 TXZ Inner Shield . 2nd Source New. Endura 5500 PVD.
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0021-35749 Ring, Isolator TXZ, 200 Mm, REFURBISHED
0021-35749 Ring, Isolator TXZ, 200 mm, REFURBISHED . 2nd Source New. Endura 5500 PVD.
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0020-91291 Door Slit Liner,300mm Emax
0020-91291 DOOR SLIT LINER,300MM eMAX . 2nd Source New.
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0040-50414 Door Slit Valve Waffle-less 200 Emax
0040-50414 DOOR SLIT VALVE WAFFLE-LESS 200 EMAX . 2nd Source New. AMAT CENTURA EMAX.
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0021-06092door Slit Liner
0021-06092DOOR SLIT LINER . 2nd Source New. AMAT OXIDE ETCH 5000.
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0021-09835 R2 Liner
0021-09835 R2 LINER . 2nd Source New.
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0020-05749 ADAPTOR W/B LOADLOCK ENDURA I/F
0020-05749 ADAPTOR W/B LOADLOCK ENDURA I/F . 2nd Source New.
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0240-20021 BASIC PARTS
0240-20021 BASIC PARTS . 2nd Source New.
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0020-29343 Clamp Shield Dark SPACE
0020-29343 Clamp Shield Dark SPACE . 2nd Source New.
WEBBonded Slit Valve Doors Increase Wafer Production in HDPCVD Processing. Valve Seal. perfluoroelastomer. Contact Us. Greene Tweed Kulpsville, PA, USA. Tel: Fax:...
WEBBonded Slit Valve Door. ENGINEERED COMPONENTS The Bonded Slit Valve Door or “BSV” increases the life expectancy and performance of the door’s seal during semiconductor processing. Made from Greene,...
WEBSlit valve door. United States Patent 5579718. Abstract: An improved slit valve door for sealing an aperture in the wall of a semiconductor process chamber. The slit valve door consists of an...
WEBV77 Series: Rectangular Transfer Valve (Slit Valves) - Door. Applications. Plasma Etch, CVD, Sputter Deposition; Manufacturing of solar panels; Semiconductor processing; LCD/flat panel processes;...
WEBBonded door seals for gate valves and slit valve door seal applications provide improved sealing performance versus conventional O-rings by reducing particle generation, extending seal life and...
WEBSeals, unlike a transfer valve, only one vacuum chamber for loading or processing. The other side of the door is therefore always under atmospheric pressure. All VAT solutions are tailored to the...


