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0010-20252 Wafer Rotation Assy
0010-20252 Wafer Rotation Assy. 2nd Source New. AMAT Endura 5500 PVD.
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0010-20132 6" Transfer Blade Assy
0010-20132 6 Transfer Blade Assy . 2nd Source New. AMAT Endura 5500 PVD.
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0020-05364 DISK, 8 SHUTTER, SNNF BESCICE W
0020-05364 DISK, 8 SHUTTER, SNNF BESCICE W. 2nd Source New. Endura 5500 PVD.
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0020-28346 8"CLAMP RING
0020-28346 8CLAMP RING . 2nd Source New. Endura 5500 PVD.
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0020-91291 Door Slit Liner,300mm Emax
0020-91291 DOOR SLIT LINER,300MM eMAX . 2nd Source New.
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0040-79913 Cathode Liner,W/leak Check Port,300mm
0040-79913 CATHODE LINER,W/LEAK CHECK PORT,300MM . 2nd Source New.
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0040-33998liner Slit Liner Door
0040-33998LINER SLIT LINER DOOR . 2nd Source New. AMAT CENTRURA 5200 MXP.
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0010-13774 Assy, Wafer Lift Cooldown/passthru
0010-13774 ASSY, WAFER LIFT COOLDOWN/PASSTHRU . 2nd Source New. AMAT Endura 5500 PVD.
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0021-23198 HOOP LIFT OPEN 8 INCH MCA E-CHUCK
0021-23198 HOOP LIFT OPEN 8 INCH MCA E-CHUCK . 2nd Source New.
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0020-70284 TUBE, ROBOT
0020-70284 TUBE, ROBOT. 2nd Source New. AMAT Endura 5500.
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0020-23753 PEDESTAL LIFT SLEEVE PRECLEAN
0020-23753 PEDESTAL LIFT SLEEVE PRECLEAN . 2nd Source New.
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0020-23442 COVER PLUMBING MOTORIZED LFT
0020-23442 COVER PLUMBING MOTORIZED LFT . 2nd Source New.
The U.S. Department of Energy's Office of Scientific and Technical Information...
A compact and lightweight rotary heat exchanger for transferring heat from a hot gas flow to a cold gas flow has a low mass matrix in the form of a wheel. The matrix is rotated at high speed...
The air from outside flows through half the storage mass, while the exhaust air traverses the other half. In this process, the majority of the exhaust air heat is transmitted to the storage mass.This...
Air-conditioning systems with rotation heat exchangers score points with regard to their investment and operation. With only 200 mm in length, these heat recovery systems achieve efficiencies that...
The rotary heat exchanger is the core of this device. Without water usage, its fully automatic rotor cleaning ensures, even in the event of a high degree of dust, ideal efficiency. The rotating...
a heat exchanger is described comprising: (a) a hollow drum through which a heating or heated medium can be circulated, (b) means rotatably mounting the hollow drum within an outer...


